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DOI: 10.3390/bios8030072
¤ OpenAccess: Gold
This work has “Gold” OA status. This means it is published in an Open Access journal that is indexed by the DOAJ.

Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection

Kristina A. Malsagova,Tatyana O. Pleshakova,Andrey F. Kozlov,Ivan D. Shumov,M. A. Il’nitskiĭ,A. V. Miakonkikh,Владимир Попов,К. В. Руденко,Alexander V. Glukhov,Igor N. Kupriyanov,Nina D. Ivanova,A. E. Rogozhin,Alexander I. Archakov,Yuri D. Ivanov

Stack (abstract data type)
Raman spectroscopy
Materials science
2018
Application of micro-Raman spectroscopy for the monitoring of quality of high-k (h-k) dielectric protective layer deposition onto the surface of a nanowire (NW) chip has been demonstrated. A NW chip based on silicon-on-insulator (SOI) structures, protected with a layer of high-k dielectric ((h-k)-SOI-NW chip), has been employed for highly sensitive detection of microRNA (miRNA) associated with oncological diseases. The protective dielectric included a 2-nm-thick Al2O3 surface layer and a 8-nm-thick HfO2 layer, deposited onto a silicon SOI-NW chip. Such a chip had increased time stability upon operation in solution, as compared with an unprotected SOI-NW chip with native oxide. The (h-k)-SOI-NW biosensor has been employed for the detection of DNA oligonucleotide (oDNA), which is a synthetic analogue of miRNA-21 associated with oncological diseases. To provide biospecificity of the detection, the surface of (h-k)-SOI-NW chip was modified with oligonucleotide probe molecules (oDVA probes) complementary to the sequence of the target biomolecule. Concentration sensitivity of the (h-k)-SOI-NW biosensor at the level of DL~10−16 M has been demonstrated.
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    Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection” is a paper by Kristina A. Malsagova Tatyana O. Pleshakova Andrey F. Kozlov Ivan D. Shumov M. A. Il’nitskiĭ A. V. Miakonkikh Владимир Попов К. В. Руденко Alexander V. Glukhov Igor N. Kupriyanov Nina D. Ivanova A. E. Rogozhin Alexander I. Archakov Yuri D. Ivanov published in 2018. It has an Open Access status of “gold”. You can read and download a PDF Full Text of this paper here.