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DOI: 10.1126/science.abk3195
¤ OpenAccess: Bronze
This work has “Bronze” OA status. This means it is free to read on the publisher landing page, but without any identifiable license.

Highly enhanced ferroelectricity in HfO <sub>2</sub> -based ferroelectric thin film by light ion bombardment

Soo‐Jung Kang,Woo‐Sung Jang,Anna N. Morozovska,Oh Heon Kwon,Yeongrok Jin,Young‐Hoon Kim,Hagyoul Bae,Chenxi Wang,Sang‐Hyeok Yang,Alex Belianinov,Steven Randolph,Eugene A. Eliseev,Liam Collins,Yeehyun Park,Sanghyun Jo,Min‐Hyoung Jung,Kyoung‐June Go,Hae Won Cho,Si‐Young Choi,Jae Hyuck Jang,Sunkook Kim,Hu Young Jeong,Jaekwang Lee,Olga S. Ovchinnikova,Jinseong Heo,Sergei V. Kalinin,Young Min Kim,Yunseok Kim

Ferroelectricity
Materials science
Vacancy defect
2022
Continuous advancement in nonvolatile and morphotropic beyond-Moore electronic devices requires integration of ferroelectric and semiconductor materials. The emergence of hafnium oxide (HfO2)-based ferroelectrics that are compatible with atomic-layer deposition has opened interesting and promising avenues of research. However, the origins of ferroelectricity and pathways to controlling it in HfO2 are still mysterious. We demonstrate that local helium (He) implantation can activate ferroelectricity in these materials. The possible competing mechanisms, including He ion-induced molar volume changes, vacancy redistribution, vacancy generation, and activation of vacancy mobility, are analyzed. These findings both reveal the origins of ferroelectricity in this system and open pathways for nanoengineered binary ferroelectrics.
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    Highly enhanced ferroelectricity in HfO <sub>2</sub> -based ferroelectric thin film by light ion bombardment” is a paper by Soo‐Jung Kang Woo‐Sung Jang Anna N. Morozovska Oh Heon Kwon Yeongrok Jin Young‐Hoon Kim Hagyoul Bae Chenxi Wang Sang‐Hyeok Yang Alex Belianinov Steven Randolph Eugene A. Eliseev Liam Collins Yeehyun Park Sanghyun Jo Min‐Hyoung Jung Kyoung‐June Go Hae Won Cho Si‐Young Choi Jae Hyuck Jang Sunkook Kim Hu Young Jeong Jaekwang Lee Olga S. Ovchinnikova Jinseong Heo Sergei V. Kalinin Young Min Kim Yunseok Kim published in 2022. It has an Open Access status of “bronze”. You can read and download a PDF Full Text of this paper here.