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DOI: 10.1016/0039-6028(95)01351-2
OpenAccess: Closed
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An ion scattering study of the interaction of oxygen with Si(111): surface roughening and oxide growth
Hongcheng Lu,Evgeni Gusev,Eric Garfunkel,T. Gustafsson
Oxide
Oxygen
Low-energy ion scattering
1996
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“An ion scattering study of the interaction of oxygen with Si(111): surface roughening and oxide growth” is a paper by Hongcheng Lu Evgeni Gusev Eric Garfunkel T. Gustafsson published in 1996. It has an Open Access status of “closed”. You can read and download a PDF Full Text of this paper here.