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DOI: 10.23919/ltb-3d.2019.8735194
OpenAccess: Closed
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Lithium niobate-on-insulator waveguide on Si substrate fabricated by room temperature bonding

Ryo Takigawa,Keigo Kamimura,Keiichi Nakamoto,Takashi Asano

Lithium niobate
Materials science
Fabrication
2019
We have developed low-temperature bonding and surface micromachining techniques for realizing high quality lithium niobate-on-insulator (LNOI) waveguide device integrated on mature Si platform. This paper reports a fabrication of LNOI ridge waveguides on Si substrates using room-temperature bonding with Si nanoadhesive layer and ultra-precision ductile-mode cutting.
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    Lithium niobate-on-insulator waveguide on Si substrate fabricated by room temperature bonding” is a paper by Ryo Takigawa Keigo Kamimura Keiichi Nakamoto Takashi Asano published in 2019. It has an Open Access status of “closed”. You can read and download a PDF Full Text of this paper here.